Integrated circuit (ic) device

ABSTRACT

An integrated circuit (IC) device includes: a fin-type active area protruding from a substrate and extending in a first horizontal direction; a first nanosheet disposed above an upper surface of the fin-type active area with a first separation space therebetween; a second nanosheet disposed above the first nanosheet with a second separation space therebetween; a gate line extending on the substrate in a second horizontal direction intersecting the first horizontal direction, at least a portion of the gate line being disposed in the second separation space; and a bottom insulation structure disposed in the first separation space.

CROSS-REFERENCE TO THE RELATED PATENT APPLICATION

This is a Continuation of U.S. application Ser. No. 17/886,530 filedAug. 12, 2022, which is a continuation of U.S. application Ser. No.17/150,712 filed Jan. 15, 2021, which is a continuation of U.S. patentapplication Ser. No. 16/358,118, filed on Mar. 19, 2019, in the U.S.Patent and Trademark Office, which claims priority from Korean PatentApplication No. 10-2018-0107892, filed on Sep. 10, 2018, in the KoreanIntellectual Property Office, the disclosures of which are incorporatedherein by reference in their entireties.

BACKGROUND

The inventive concept relates to integrated circuit (IC) devices, andmore particularly, to an IC device including a horizontal nanosheetfield-effect transistor.

As the sizes of IC devices decrease, the integration degrees of electricfield-effect transistors on a substrate need to be increased, andaccordingly, a horizontal nanosheet field-effect transistor hNSFETincluding a plurality of horizontal nanosheets stacked on a same layoutarea has been developed. However, as the integration degrees ofsemiconductor devices increase and the sizes of devices are reduced toan extreme state, electrical characteristics of nanosheet electricfield-effect transistors may be degraded by unwanted parasitictransistors. Thus, nanosheet electric field-effect transistors need anew structure capable of improving the electrical characteristicsthereof by suppressing formation of unwanted parasitic transistors.

SUMMARY

Exemplary embodiments of the inventive concept provide an integratedcircuit (IC) device having a structure by which formation of an unwantedparasitic transistor may be suppressed and electrical characteristicsmay improve.

According to an aspect of the inventive concept, there is provided an ICdevice which may include: a fin-type active area protruding from asubstrate and extending in a first horizontal direction; a firstnanosheet disposed above an upper surface of the fin-type active areawith a first separation space therebetween; a second nanosheet disposedabove the first nanosheet with a second separation space therebetween; agate line extending on the substrate in a second horizontal directionintersecting the first horizontal direction, at least a portion of thegate line being disposed in the second separation space; and a bottominsulation structure disposed in the first separation space.

According to another aspect of the inventive concept, there is providedan IC device which may include: a fin-type active area protruding from asubstrate and extending in a first horizontal direction; a pair ofsource/drain regions disposed on the fin-type active area; a nanosheetstack structure facing an upper surface of the fin-type active area witha first separation space therebetween, the nanosheet stack structureincluding a plurality of nanosheets of which widths in the firsthorizontal direction are defined by the pair of source/drain regions; agate line including at least one sub-gate portion which extends on thefin-type active area in a second horizontal direction intersecting thefirst horizontal direction and is disposed within a second separationspace between the plurality of nanosheets; a gate dielectric layerinterposed between the plurality of nanosheets and the gate line; and abottom insulation structure filling the first separation space andhaving a thickness greater than a thickness of the gate dielectriclayer.

According to another aspect of the inventive concept, there is providedan IC device which may include: a fin-type active area extending on asubstrate in a first horizontal direction; at least one source/drainregion disposed in a row on the fin-type active area in the firsthorizontal direction; at least one nanosheet stack structure disposed onthe fin-type active area comprising a first nanosheet closest to thefin-type active area and a second nanosheet disposed above the firstnanosheet; at least one gate line covering the nanosheet stack structureon the fin-type active area, and extending in a second horizontaldirection intersecting the first horizontal direction; a gate dielectriclayer disposed between the nanosheet stack structure and the gate line;and a bottom insulation structure interposed between the fin-type activearea and the nanosheet stack structure, and integrally connected to thegate dielectric layer.

BRIEF DESCRIPTION OF THE DRAWINGS

Exemplary embodiments of the inventive concept will be more clearlyunderstood from the following detailed description taken in conjunctionwith the accompanying drawings in which:

FIG. 1 is a plan view of an integrated circuit (IC) device according toembodiments;

FIG. 2A is a cross-sectional view taken along line X-X′ of FIG. 1 , andFIG. 2B is a cross-sectional view taken along line Y-Y′ of FIG. 1 ; FIG.3A is a magnified cross-sectional view of a local area indicated by “X1”of FIG. 2A, and FIG. 3B is a magnified cross-sectional view of a localarea indicated by “Y1” of FIG. 2B;

FIGS. 4A and 4B are cross-sectional views for explaining an IC deviceaccording to embodiments;

FIGS. 5A and 5B are cross-sectional views for explaining an IC deviceaccording to embodiments;

FIGS. 6 through 10 are cross-sectional views for explaining IC devicesaccording to embodiments, respectively;

FIGS. 11 through 28B are cross-sectional views for explaining a methodof manufacturing an IC device, according to embodiments, wherein FIGS.11, 12A, 13A, 14A, 15A, 16A, 17-22, 23A, 24A, 25A, 26A, 27A, and 28A arecross-sectional views for explaining a method of manufacturing a portionof the IC device corresponding to the cross-section taken along lineX-X′ of FIG. 1 , and FIGS. 12B, 13B, 14B, 15B, 16B, 23B, 24B, 25B, 26B,27B, and 28B are cross-sectional views for explaining a method ofmanufacturing a portion of the IC device corresponding to thecross-section taken along line Y-Y′ of FIG. 1 ;

FIGS. 29A through 29C are cross-sectional views for explaining a methodof manufacturing an IC device, according to embodiments;

FIGS. 30A through 30D are cross-sectional views for explaining a methodof manufacturing an IC device, according to embodiments; and

FIGS. 31A through 31D are cross-sectional views for explaining a methodof manufacturing an IC device, according to embodiments.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS

Hereinafter, the inventive concept will be described more fully withreference to the accompanying drawings, in which embodiments of theinventive concept are shown. It is understood that all embodimentspresented herein are exemplary, and do not restrict the scope of theinventive concept. Like reference numerals in the drawings denote likeelements, and thus their description will be omitted. An embodimentprovided in the following description is not excluded from beingassociated with one or more features of another example or anotherembodiment also provided herein or not provided herein but consistentwith the inventive concept. For example, even if matters described in aspecific example or embodiment are not described in a different exampleor embodiment thereto, the matters may be understood as being related toor combined with the different example or embodiment, unless otherwisementioned in descriptions thereof.

It will be understood that when an element or layer is referred to asbeing “over,” “above,” “on,” “connected to” or “coupled to” anotherelement or layer, it can be directly over, above, on, connected orcoupled to the other element or layer or intervening elements or layersmay be present. In contrast, when an element is referred to as being“directly over,” “directly above,” “directly on,” “directly connectedto” or “directly coupled to” another element or layer, there are nointervening elements or layers present. Like numerals refer to likeelements throughout. As used herein, the term “and/or” includes any andall combinations of one or more of the associated listed items.

Spatially relative terms, such as “beneath,” “below,” “lower,” “over,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element's or feature's relationship toanother element(s) or feature(s) as illustrated in the figures. It willbe understood that the spatially relative terms are intended toencompass different orientations of the device in use or operation inaddition to the orientation depicted in the figures. For example, if thedevice in the figures is turned over, elements described as “below” or“beneath” other elements or features would then be oriented “above” theother elements or features. Thus, the term “below” can encompass both anorientation of above and below. The device may be otherwise oriented(rotated 90 degrees or at other orientations) and the spatially relativedescriptors used herein interpreted accordingly.

FIG. 1 is a plan view of an integrated circuit (IC) device 100 accordingto embodiments. FIG. 2A is a cross-sectional view taken along a lineX-X′ of FIG. 1 , and FIG. 2B is a cross-sectional view taken along aline Y-Y′ of FIG. 1 . FIG. 3A is a magnified cross-sectional view of alocal area indicated by “X1” of FIG. 2A, and FIG. 3B is a magnifiedcross-sectional view of a local area indicated by “Y1” of FIG. 2B.

Referring to FIGS. 1 through 3B, the IC device 100 includes a pluralityof fin-type active areas FA each protruding from a substrate 102 andextending in a first horizontal direction (X direction), and a pluralityof nanosheet stack structures NSS facing respective upper surfaces FT ofthe plurality of fin-type active areas FA at locations separated fromthe plurality of fin-type active areas FA.

The substrate 102 may include a semiconductor such as Si or Ge, or acompound semiconductor such as SiGe, SiC, GaAs, InAs, or InP. A trenchT1 defining the plurality of fin-type active areas FA may be formed inthe substrate 102, and may be filled with an isolation layer 114. Theisolation layer 114 may be formed of an oxide layer, a nitride layer, ora combination thereof.

On the plurality of fin-type active areas FA, each of a plurality ofgate lines 160 extend in a second horizontal direction (Y direction)perpendicular to the first horizontal direction (X direction).

In regions where the plurality of fin-type active areas FA intersectwith the plurality of gate lines 160, a plurality of nanosheet stackstructures NSS may be disposed on each of the respective upper surfacesFT of the plurality of fin-type active areas FA. The plurality ofnanosheet stack structures NSS face the upper surface FT of the fin-typeactive area FA, and are separated from the upper surface FT of thefin-type active area FA by a separation space having a first height H11.The term “height” used herein means a size in a Z direction, namely, athickness in a vertical direction, unless otherwise defined. Each of theplurality of nanosheet stack structures NSS may include a plurality ofnanosheets N1, N2, N3, and N4 each extending parallel to the uppersurface FT of the fin-type active area FA.

As shown in FIG. 1 , on an X-Y plane on the substrate 102, each of theplurality of nanosheet stack structures NSS may have a plane area thatis greater than a plane area of a region where each fin-type active areaFA and each gate line 160 overlap each other. Although a planar shape ofeach nanosheet stack structure NSS is approximately rectangular in FIG.1 , embodiments are not limited thereto. Each nanosheet stack structureNSS may have various planar shapes according to a planar shape of eachfin-type active area FA and that of each gate line 160.

The plurality of nanosheets N1, N2, N3, and N4 may include a firstnanosheet N1, a second nanosheet N2, a third nanosheet N3, and a fourthnanosheet N4 sequentially stacked on the upper surface FT of thefin-type active area FA. The first nanosheet N1 closest to the fin-typeactive area FA from among the plurality of nanosheets N1, N2, N3, and N4may face the upper surface FT of the fin-type active area FA, and may beseparated from the upper surface FT with the separation space of thefirst height H11 disposed therebetween. The second nanosheet N2 may facethe upper surface FT of the fin-type active area FA with the firstnanosheet N1 disposed therebetween, and may be separated from the firstnanosheet N1 with a separation space of a second height H12 that isgreater than the first height H11. A height of a separation spacebetween the second nanosheet N2 and the third nanosheet N3 and that of aseparation space between the third nanosheet N3 and the fourth nanosheetN4 may each be equal to or similar to the second height H12.

The present embodiment illustrates a structure in which a plurality ofnanosheet stack structures NSS and a plurality of gate lines 160 areformed on a single fin-type active area FA, and the plurality ofnanosheet stack structures NSS are disposed in a row in the firsthorizontal direction (X direction) on the single fin-type active areaFA. However, according to the inventive concept, the number of nanosheetstack structure NSS disposed on a single fin-type active area FA is notparticularly limited. For example, one nanosheet stack structure NSS maybe formed on one fin-type active area FA. Although the presentembodiment illustrates a case where each of the plurality of nanosheetstack structures NSS includes four nanosheets N1, N2, N3, and N4, theinventive concept is not limited thereto. For example, each of theplurality of nanosheet stack structures NSS may include at least twonanosheets, and the number of nanosheets included in each nanosheetstack structure NSS is not particularly limited.

Each of the plurality of nanosheets N1, N2, N3, and N4 may have achannel region. A channel may be formed around an upper surface and alower surface of each of the second through fourth nanosheets N2, N3,and N4 except for the first nanosheet N1 from among the plurality ofnanosheets N1, N2, N3, and N4. A channel may be formed around an uppersurface of the first nanosheet N1, but no channels are formed around alower surface of the first nanosheet N1 that faces the fin-type activearea FA.

According to some embodiments, each of the plurality of nanosheets N1,N2, N3, and N4 may have a thickness in a vertical direction that iswithin a range of about 4.5 nm to about 5.5 nm. According to someembodiments, the plurality of nanosheets N1, N2, N3, and N4 may havesubstantially the same thickness. The plurality of nanosheets N1, N2,N3, and N4 may be formed of the same material. According to someembodiments, the plurality of nanosheets N1, N2, N3, and N4 may beformed of the same material as that used to form the substrate 102.

The plurality of gate lines 160 may surround at least portions of theplurality of nanosheets N1, N2, N3, and N4 while covering the pluralityof nanosheet stack structures NSS over the fin-type active area FA. Eachof the plurality of gate lines 160 may include a main gate portion 160Mcovering the upper surface of each nanosheet stack structure NSS andextending in the second horizontal direction (Y direction), and aplurality of sub-gate portions 160S integrally connected to the maingate portion 160M and disposed within the separation spaces between theplurality of nanosheets N1, N2, N3, and N4. In a vertical direction (Zdirection), a thickness of each of the plurality of sub-gate portions160S may be less than that of the main gate portion 160M. The pluralityof gate lines 160 do not extend to a space between the fin-type activearea FA and the first nanosheet N1, and accordingly, each of theplurality of gate lines 160 does not have a sub-gate portion disposedbetween the fin-type active area FA and the first nanosheet N1.Accordingly, as shown in FIGS. 2B and 3B, as viewed from a cross-sectionin the Y direction, the second through fourth nanosheets N2, N3, and N4except for the first nanosheet N1 from among the plurality of nanosheetsN1, N2, N3, and N4 may have a gate-all-around (GAA) structure that iscompletely surrounded by a gate line 160. On the contrary, the firstnanosheet N1 may not have the GAA structure. In more detail, the lowersurface of the first nanosheet N1 that faces the fin-type active area FAmay not be covered by the gate line 160, and only the upper surface ofthe first nanosheet N1 that faces the second nanosheet N2 and bothsidewalls thereof in the Y direction may be covered by the gate line160. Accordingly, a region around the upper surface of the firstnanosheet N1 facing the second nanosheet N2 and regions around the bothsidewalls of the first nanosheet N1 in the Y direction may be used as achannel region, but a region around the lower surface of the firstnanosheet N1 that faces the fin-type active area FA may not be used as achannel region. A space between the first nanosheet N1 and the fin-typeactive area FA may be filled with a comparatively thick bottominsulation structure, and thus the first nanosheet N1 may constitute afully depleted device.

The gate line 160 may be formed of metal, metal nitride, metal carbide,or a combination thereof. The metal may be selected from Ti, W, Ru, Nb,Mo, Hf, Ni, Co, Pt, Yb, Tb, Dy, Er, and Pd. The metal nitride may beselected from TiN and TaN. The metal carbide may be TiAlC.

A gate dielectric layer 152 is formed between the nanosheet stackstructure NSS and the gate line 160. The gate dielectric layer 152 maycover a surface of each of the plurality of nanosheets N1, N2, N3, andN4 to have a first thickness TH11. The first thickness TH11 of the gatedielectric layer 152 may be less than the first height H11 of theseparation space between the fin-type active area FA and the firstnanosheet N1. According to some embodiments, the first thickness TH11may be less than the first height H11 and may be less than or equal to ½of the first height H11. According to embodiments, the first thicknessTH11 may be greater than ½ of the first height H11.

According to some embodiments, the gate dielectric layer 152 may be astack of an interfacial layer and high-k dielectric layer. Theinterfacial layer may be formed of a low dielectric material layerhaving a dielectric constant of about 9 or less, for example, a siliconoxide layer, a silicon oxynitride layer, or a combination thereof.According to some embodiments, the interfacial layer may not be formed.The high-k dielectric layer may include a material having a dielectricconstant that is greater than that of a silicon oxide layer. Forexample, the high-k dielectric layer may have a dielectric constant ofabout 10 to about 25. The high-k dielectric layer may be, but is notlimited to, formed of hafnium oxide.

As shown in FIGS. 2B and 3B, as viewed from a cross-section in the Ydirection, the second through fourth nanosheets N2, N3, and N4 exceptfor the first nanosheet N1 from among the plurality of nanosheets N1,N2, N3, and N4 may be completely surrounded by the gate dielectric layer152. Only the upper surface of the first nanosheet N1 facing the secondnanosheet N2, and the both sidewalls of the first nanosheet N1 in the Ydirection may be covered by the gate dielectric layer 152.

A plurality of source/drain regions 130 may be formed on the fin-typeactive area FA. As shown in FIGS. 2A and 3A, both sidewalls of each ofthe plurality of nanosheets N1, N2, N3, and N4 in the X direction maycontact source/drain regions 130. A width of each of the plurality ofnanosheets N1, N2, N3, and N4 in the X direction may be defined by apair of source/drain regions 130 existing at both sides of the pluralityof nanosheets N1, N2, N3, and N4. A lower surface level LV11 of each ofthe plurality of source/drain regions 130 may be lower than a level LV12of the upper surface FT of the fin-type active area FA. The plurality ofsource/drain regions 130 may be formed of an epitaxially-grownsemiconductor layer. For example, the plurality of source/drain regions130 may be formed of an Si layer, an SiGe layer, or an SiC layer.

The separation space between the lower surface of the first nanosheet N1and the fin-type active area FA may be filled with a bottom insulationstructure 154. The bottom insulation structure 154 may have a structureintegrally connected with the gate dielectric layer 152. At least aportion of the bottom insulation structure 154 may include the samematerial as that included in the gate dielectric layer 152. For example,the bottom insulation structure 154 may include a silicon oxide layer, ahigh-k dielectric layer having a higher dielectric constant than adielectric constant of the silicon oxide layer, an air gap, or acombination thereof. The term “air” used herein may mean the atmosphericair, or other gases that may exist during a manufacturing process.

The bottom insulation structure 154 may include a first insulationportion 154A that fills the separation space between the lower surfaceof the first nanosheet N1 and the fin-type active area FA, and a secondinsulation portion 154B extending from the first insulation portion 154Ain the second horizontal direction (Y direction) and interposed betweenthe isolation layer 114 and the gate line 160. The second insulationportion 154B may be formed at both sides of the first insulation portion154A in the Y direction. A thickness of the second insulation portion154B in the vertical direction may be less than that of the firstinsulation portion 154A in the vertical direction. The first insulationportion 154A may have a second thickness TH12 that is greater than thefirst thickness TH11 of the gate dielectric layer 152. The secondthickness TH12 may be substantially equal to the first height H11. Thethickness of the second insulation portion 154B may be substantiallyequal to the first thickness TH11 of the gate dielectric layer 152. Asshown in FIGS. 2B and 3B, the bottom insulation structure 154 may extendin the Y direction between the substrate 102 and the gate line 160, andmay have a variable thickness in the Y direction.

A metal silicide layer 182 may be formed on an upper surface of each ofthe plurality of source/drain regions 130. The metal silicide layers 182may be formed of titanium silicide, but embodiments are not limitedthereto. The metal silicide layers 182 may not be formed.

A plurality of first insulation spacers 118 covering sidewalls of thegate lines 160 are formed on the plurality of nanosheet stack structuresNSS. The plurality of first insulation spacers 118 and the plurality ofsource/drain regions 130 may be covered by a protective insulation layer142. The first insulation spacers 118 and the protective insulationlayer 142 may cover sidewalls of the main gate portions 160M. Each ofthe first insulation spacers 118 and the protective insulation layer 142may be formed of SiN, SiCN, SiBN, SiON, SiOCN, SiBCN, SiOC, SiO₂, or acombination thereof. According to some embodiments, the protectiveinsulation layer 142 may not be formed.

Second insulation spacers 120 that contact the source/drain regions 130are formed in spaces between the plurality of nanosheets N1, N2, N3, andN4. Some of the second insulation spacers 120 may be interposed betweenthe sub-gate portions 160S and the source/drain regions 130. As shown inFIG. 2A, both sidewalls of each of the three sub-gate portions 160S inthe IC device 100 may be covered by the second insulation spacers 120with the gate dielectric layer 152 disposed therebetween. Both sidewallsof the first insulation portion 154A of the bottom insulation structure154 in the X direction may be covered by second insulation spacers 120Bclosest to the fin-type active area FA from among the second insulationspacers 120. The second insulation spacers 120B may be interposedbetween the bottom insulation structure 154 and the source/drain regions130. A thickness of each of the second insulation spacers 120B in thevertical direction may be less than that of each of the other secondinsulation spacers 120 in the vertical direction.

A width of the bottom insulation structure 154 in the X direction may bedefined by a pair of second insulation spacers 120B covering bothsidewalls of the bottom insulation structure 154. The width of thebottom insulation structure 154 in the X direction may be less than thatof each of the plurality of nanosheets N1, N2, N3, and N4 in the Xdirection.

According to some embodiments, the first insulation spacers 118 and thesecond insulation spacers 120 may be formed of the same material.According to embodiments, the first insulation spacers 118 and thesecond insulation spacers 120 may be formed of different materials.According to some embodiments, the second insulation spacers 120 may beformed of SiN, SiCN, SiBN, SiON, SiOCN, SiBCN, SiOC, SiO₂, or acombination thereof. According to embodiments, the second insulationspacers 120 may include air gaps.

As shown in FIG. 2A, an inter-gate insulation layer 144 and aninterlayer insulation layer 174 are sequentially formed on the pluralityof source/drain regions 130. The inter-gate insulation layer 144 and theinterlayer insulation layer 174 may each be formed of a silicon oxidelayer.

A plurality of contact plugs 184 may be connected to the plurality ofsource/drain regions 130 via the plurality of metal silicide layers 182.The plurality of contact plugs 184 may penetrate through the interlayerinsulation layer 174, the inter-gate insulation layer 144, and theprotective insulation layer 142, and may be connected to the pluralityof metal silicide layers 182. The plurality of contact plugs 184 mayeach be formed of metal, conductive metal nitride, or a combinationthereof. For example, the plurality of contact plugs 184 may each beformed of W, Cu, Al, Ti, Ta, TiN, TaN, an alloy thereof, or acombination thereof.

In the IC device 100 described above with reference to FIGS. 1 through3B, the space between the first nanosheet N1 closest to the fin-typeactive area FA from among the plurality of nanosheets N1, N2, N3, and N4and the fin-type active area FA is filled with the bottom insulationstructure 154, and no sub-gate portions are formed between the firstnanosheet N1 and the fin-type active area FA. Accordingly, formation ofan unwanted channel around the upper surface FT of the fin-type activearea FA facing the lower surface of the first nanosheet N1 may besuppressed, and no unwanted parasitic transistors may be formed aroundthe upper surface FT of the fin-type active area FA. Accordingly,degradation of electrical characteristics that may occur due to aparasitic transistor, such as a parasitic capacitance increase, aleakage current increase, and a subthreshold swing increase, may beprevented.

FIGS. 4A and 4B are cross-sectional views for explaining an IC device200 according to embodiments. FIG. 4A is a magnified cross-sectionalview of an area corresponding to the local area indicated by “X1” ofFIG. 2A, and FIG. 4B is a magnified cross-sectional view of an areacorresponding to the local area indicated by “Y1” of FIG. 2B. The samereference characters and numerals in FIGS. 4A and 4B as those in FIGS. 1through 3B denote the same elements, and thus their description will beomitted herein.

Referring to FIGS. 4A and 4B, the IC device 200 has almost the samestructure as that of the IC device 100 described above with reference toFIGS. 1 through 3B. However, the IC device 200 includes a bottominsulation structure 254 instead of the bottom insulation structure 154.The bottom insulation structure 254 may include an air gap 254AGexisting within a separation space between the first nanosheet N1 andthe fin-type active area FA, a first insulation portion 254A disposedwithin the separation space and defining the air gap 254AG, and a secondinsulation portion 254B extending from both sides of the firstinsulation portion 254A in the Y direction. An upper limit and a lowerlimit of the air gap 254AG may be defined by the first insulationportion 254A.

In the IC device 200, a separation space between the lower surface ofthe first nanosheet N1 and the fin-type active area FA may have a firstheight H21. The second nanosheet N2 may be separated from the firstnanosheet N1 with a separation space of a second height H22 that isgreater than the first height H21. The first height H21 may be greaterthan twice of the first thickness TH11 of the gate dielectric layer 152.

The first insulation portion 254A may have a second thickness TH22 thatis greater than the first thickness TH11 of the gate dielectric layer152. The second thickness TH22 may be substantially equal to the firstheight H21. A height AH22 of the air gap 254AG may be less than or equalto the first thickness TH11 of the gate dielectric layer 152. The secondinsulation portion 254B may be interposed between the isolation layer114 and the gate line 160. The first insulation portion 254A may beintegrally connected with the gate dielectric layer 152.

The gate line 160 may include a protrusion 160P that protrudes towardthe air gap 254AG of the bottom insulation structure 254. A width of theair gap 254AG in the Y direction may be defined by the protrusion 160Pof the gate line 160. A detailed description of the bottom insulationstructure 254 is mostly the same as that of the bottom insulationstructure 154 made above with reference to FIGS. 1 through 3B.

FIGS. 5A and 5B are cross-sectional views for explaining an IC device300 according to embodiments. FIG. 5A is a magnified cross-sectionalview of an area corresponding to the local area indicated by “X1” ofFIG. 2A, and FIG. 5B is a magnified cross-sectional view of an areacorresponding to the local area indicated by “Y1” of FIG. 2B. The samereference characters and numerals in FIGS. 5A and 5B as those in FIGS. 1through 3B denote the same elements, and thus their description will beomitted herein.

Referring to FIGS. 5A and 5B, the IC device 300 has almost the samestructure as that of the IC device 100 described above with reference toFIGS. 1 through 3B. However, the IC device 300 includes a nanosheetstack structure NSS3 instead of the nanosheet stack structure NSS. Thenanosheet stack structure NSS3 may include a plurality of nanosheetsN31, N2, N3, and N4. At least some of the plurality of nanosheets N31,N2, N3, and N4 may have different thicknesses. For example, a thicknessin a vertical direction of the first nanosheet N31 closest to thefin-type active area FA from among the plurality of nanosheets N31, N2,N3, and N4 may be less than that of each of the second through fourthnanosheets N2, N3, and N4. For example, the first nanosheet N31 may havea thickness in a vertical direction which is within a range of about 1nm to about 3 nm. A detailed description of the first nanosheet N31 ismostly the same as that of the first nanosheet N1 made above withreference to FIGS. 1 through 3B.

FIG. 6 is a cross-sectional view for explaining an IC device 400according to embodiments. FIG. 6 illustrates a cross-sectional structureof a portion of the IC device 400 corresponding to the cross-sectiontaken along the line X-X′ of FIG. 1 . The same reference characters andnumerals in FIG. 6 as those in FIGS. 1 through 3B denote the sameelements, and thus their description will be omitted herein.

Referring to FIG. 6 , the IC device 400 has almost the same structure asthat of the IC device 100 described above with reference to FIGS. 1through 3B. However, the IC device 400 does not include the secondinsulation spacers 120 included in the IC device 100, and includes aplurality of gate lines 460 instead of the plurality of gate lines 160and includes a gate dielectric layer 452 instead of the gate dielectriclayer 152.

Each of the plurality of gate lines 460 may include a main gate portion460M covering the upper surface of each of the nanosheet stackstructures NSS and extending in the Y direction, and a plurality ofsub-gate portions 460S integrally connected to the main gate portion460M and disposed within the separation spaces between the plurality ofnanosheets N1, N2, N3, and N4. In the vertical direction, a thickness ofeach of the plurality of sub-gate portions 460S may be less than that ofthe main gate portion 460M. Each of the plurality of gate lines 460 doesnot include a sub-gate portion disposed between the fin-type active areaFA and the first nanosheet N1.

In the X direction, a width SGW of each of the plurality of sub-gateportions 460S may be greater than a width MGW of the main gate portion460M. Each of the plurality of sub-gate portions 460S may be separatedfrom source/drain regions 130 with the gate dielectric layer 452disposed therebetween.

A space between the lower surface of the first nanosheet N1 and thefin-type active area FA may be filled with a bottom insulation structure454. The bottom insulation structure 454 may have a structure integrallyconnected with the gate dielectric layer 452. A width of the bottominsulation structure 454 in the X direction may be equal to or similarto that of each of the plurality of nanosheets N1, N2, N3, and N4 in theX direction. In the X direction, both sidewalls of the bottom insulationstructure 454 may contact a pair of source/drain regions 130 disposed atboth sides of a gate line 460. A width 454 W of the bottom insulationstructure 454 in the X direction may be defined by a pair ofsource/drain regions 130. The width 454 W of the bottom insulationstructure 454 in the X direction may be greater than the width SGW ofeach of the plurality of sub-gate portions 460S. Detailed descriptionsof the gate lines 460, the gate dielectric layer 452, and the bottominsulation structure 454 are mostly the same as those of the gate lines160, the gate dielectric layer 152, and the bottom insulation structure154 made above with reference to FIGS. 1 through 3B.

FIG. 7 is a cross-sectional view for explaining an IC device 500according to embodiments. FIG. 7 illustrates a cross-sectional structureof a portion of the IC device 500 corresponding to the cross-sectiontaken along the line X-X′ of FIG. 1 . The same reference characters andnumerals in FIG. 7 as those in FIGS. 1 through 3B denote the sameelements, and thus their description will be omitted herein.

Referring to FIG. 7 , the IC device 500 has almost the same structure asthat of the IC device 100 described above with reference to FIGS. 1through 3B. However, in the IC device 500, a plurality of source/drainregions 530 are formed on the fin-type active area FA.

Both sidewalls of each of the second through fourth nanosheets N2, N3,and N4 from among the plurality of nanosheets N1, N2, N3, and N4included in each nanosheet stack structure NSS may contact a pluralityof source/drain region 530. An upper surface of the first nanosheet N1may contact a lower surface of each of the plurality of source/drainregions 530. The first nanosheet N1 may include portions that arevertically overlapped by the plurality of source/drain region 530. Athickness of the portions of the first nanosheet N1 that are verticallyoverlapped by the plurality of source/drain region 530 may be less thanthat of portions of the first nanosheet N1 that are verticallyoverlapped by each gate line 160. According to some embodiments, athickness of the first nanosheet N1 may be different from that of eachof the second through fourth nanosheets N2, N3, and N4. For example, thethickness of the first nanosheet N1 may be less than that of each of thesecond through fourth nanosheets N2, N3, and N4. For example, each ofthe second through fourth nanosheets N2, N3, and N4 may have a thicknessthat is within a range of about 4.5 nm to about 5.5 nm, and the firstnanosheet N1 may have a thickness that is within a range of about 1 nmto about 3 nm. According to embodiments, the thickness of the firstnanosheet N1 may be substantially equal to or similar to that of each ofthe second through fourth nanosheets N2, N3, and N4.

The IC device 500 may include a bottom insulation structure 554extending in the X direction on the upper surface FT of the fin-typeactive area FA. The bottom insulation structure 554 may include a firstinsulation portion 554A that fills a space between the first nanosheetN1 and the fin-type active area FA, a second insulation portion 154B(see FIG. 2B) extending from both sides of the first insulation portion554A in the Y direction and interposed between the isolation layer 114and the gate line 160, and a third insulation portion 554C extendingfrom both sides of the first insulation portion 554A in the X directionand interposed between the fin-type active area FA and source/drainregions 530. The first insulation portion 554A and the third insulationportion 554C may be integrally connected to each other, and may havesubstantially the same thickness as each other. A thickness of each ofthe first insulation portion 554A and the third insulation portion 554Cmay be greater than that of the second insulation portion 154B (see FIG.2B), and may be greater than that of the gate dielectric layer 152. Thebottom insulation structure 554 may have a structure integrallyconnected with the gate dielectric layer 152.

A lower surface level of each of the plurality of source/drain regions530 may be higher than an upper surface level of the bottom insulationstructure 554. The bottom insulation structure 554 may be separated fromthe source/drain regions 530 with the first nanosheet N1 disposedtherebetween. One bottom insulation structure 554 may be disposed on onefin-type active area FA, and a plurality of nanosheet stack structuresNSS, a plurality of gate lines 160, and a plurality of source/drainregions 530 may be disposed on the single bottom insulation structure554 on the single fin-type active area FA. Reference may be made to thedescriptions of the bottom insulation structure 154 and the source/drainregions 130 made above with reference to FIGS. 1 through 3B in order todescribe materials used to form the bottom insulation structure 554 andthe source/drain regions 530.

Similar to the IC device 100 described above with reference to FIGS. 1through 3B, the IC device 500 may include second insulation spacers 120that are formed in spaces between the plurality of nanosheets N1, N2,N3, and N4 and contact the source/drain regions 530. However, incontrast with the IC device 100, the IC device 500 may not include thesecond insulation spacers 120B disposed between the fin-type active areaFA and the first nanosheet N1.

FIG. 8 is a cross-sectional view for explaining an IC device 500according to embodiments. FIG. 8 illustrates a cross-sectional structureof a portion of the IC device 600 corresponding to the cross-sectiontaken along the line X-X′ of FIG. 1 . The same reference characters andnumerals in FIG. 8 as those in FIGS. 1 through 3B denote the sameelements, and thus their description will be omitted herein.

Referring to FIG. 8 , the IC device 600 has almost the same structure asthat of the IC device 500 described above with reference to FIG. 7 .However, the IC device 600 may include a bottom insulation structure654. The bottom insulation structure 654 may include a first insulationportion 654A that fills a space between the first nanosheet N1 and thefin-type active area FA, a second insulation portion 154B (see FIG. 2B)extending from both sides of the first insulation portion 654A in the Ydirection and interposed between the isolation layer 114 and the gateline 160, and a third insulation portion 654C extending from both sidesof the first insulation portion 654A in the X direction and interposedbetween the fin-type active area FA and source/drain regions 530. Thefirst insulation portion 654A and the third insulation portion 654C maybe integrally connected to each other, and may have substantially thesame thickness as each other. A thickness of each of the firstinsulation portion 654A and the third insulation portion 654C may begreater than that of the second insulation portion 154B (see FIG. 2B),and may be greater than that of the gate dielectric layer 152. Thebottom insulation structure 654 may have a structure integrallyconnected with the gate dielectric layer 152.

A lower surface level of each of the plurality of source/drain regions530 may be higher than an upper surface level of the bottom insulationstructure 654. The bottom insulation structure 654 may be separated fromthe source/drain regions 530 with the first nanosheet N1 disposedtherebetween. A plurality of bottom insulation structures 654 may bedisposed on a single fin-type active area FA. One nanosheet stackstructure NSS and one gate line 160 may be disposed on a single bottominsulation structure 654 on the single fin-type active area FA.Reference may be made to the detailed description of the bottominsulation structure 154 made above with reference to FIGS. 1 through3B, in order to describe a material used to form the bottom insulationstructure 654.

A semiconductor pattern 604 may be interposed between the upper surfaceFT of the fin-type active area FA and the source/drain regions 530. Awidth of the bottom insulation structure 654 in the X direction may bedefined by the semiconductor pattern 604. Each source/drain region 530may be separated from the fin-type active area FA with the semiconductorpattern 604 and the first nanosheet N1 disposed therebetween. Thesemiconductor pattern 604 may be formed of a material that is differentfrom that used to form the first nanosheet N1. According to someembodiments, the semiconductor pattern 604 may be formed of SiGe.

FIG. 9 is a cross-sectional view for explaining an IC device 700according to embodiments. FIG. 9 illustrates a cross-sectional structureof a portion of the IC device 700 corresponding to the cross-sectiontaken along the line X-X′ of FIG. 1 . The same reference characters andnumerals in FIG. 9 as those in FIGS. 1 through 3B denote the sameelements, and thus their description will be omitted herein.

Referring to FIG. 9 , the IC device 700 has almost the same structure asthat of the IC device 100 described above with reference to FIGS. 1through 3B. However, in the IC device 700, a plurality of source/drainregions 730 are formed on the fin-type active area FA. Both sidewalls ofeach of the plurality of nanosheets N1, N2, N3, and N4 may contact theplurality of source/drain regions 730.

According to some embodiments, a thickness of the first nanosheet N1 maybe different from that of each of the second through fourth nanosheetsN2, N3, and N4. For example, the thickness of the first nanosheet N1 maybe less than that of each of the second through fourth nanosheets N2,N3, and N4. According to embodiments, the thickness of the firstnanosheet N1 may be substantially equal to or similar to that of each ofthe second through fourth nanosheets N2, N3, and N4.

The IC device 700 may include a bottom insulation structure 754extending in the X direction on the upper surface FT of the fin-typeactive area FA. The bottom insulation structure 754 may include a firstinsulation portion 754A that fills a space between the first nanosheetN1 and the fin-type active area FA, a second insulation portion 154B(see FIG. 2B) extending from both sides of the first insulation portion754A in the Y direction and interposed between the isolation layer 114and the gate line 160, and a third insulation portion 754C extendingfrom both sides of the first insulation portion 754A in the X directionand interposed between the fin-type active area FA and source/drainregions 730. The first insulation portion 754A and the third insulationportion 754C may be integrally connected to each other, and a thicknessof the third insulation portion 754C may be less than that of the firstinsulation portion 754A. The bottom insulation structure 754 may have astructure integrally connected with the gate dielectric layer 152.

An upper surface of the bottom insulation structure 754 may contact alower surface of each of the plurality of source/drain regions 730. Athickness of portions of the bottom insulation structure 754 that arevertically overlapped by the plurality of source/drain region 730 may beless than that of portions of the bottom insulation structure 754 thatare vertically overlapped by each gate line 160. A lower surface levelof each of the plurality of source/drain regions 730 may be higher thanthe level of the upper surface FT of the fin-type active area FA. Onebottom insulation structure 754 may be disposed on one fin-type activearea FA, and a plurality of nanosheet stack structures NSS, a pluralityof gate lines 160, and a plurality of source/drain regions 730 may bedisposed on the single bottom insulation structure 754 on the singlefin-type active area FA. Reference may be made to the descriptions ofthe bottom insulation structure 154 and the source/drain regions 130made above with reference to FIGS. 1 through 3B in order to describematerials used to form the bottom insulation structure 754 and thesource/drain regions 730.

Similar to the IC device 100 described above with reference to FIGS. 1through 3B, the IC device 700 may include second insulation spacers 120that are formed in spaces between the plurality of nanosheets N1, N2,N3, and N4 and contact the source/drain regions 730. However, incontrast with the IC device 100, the IC device 700 may not include thesecond insulation spacers 120B disposed between the fin-type active areaFA and the first nanosheet N1.

FIG. 10 is a cross-sectional view for explaining an IC device 800according to other embodiments. FIG. 10 illustrates a cross-sectionalstructure of a portion of the IC device 800 corresponding to thecross-section taken along the line X-X′ of FIG. 1 . The same referencecharacters and numerals in FIG. 10 as those in FIGS. 1 through 3B denotethe same elements, and thus their description will be omitted herein.

Referring to FIG. 10 , the IC device 800 has almost the same structureas that of the IC device 700 described above with reference to FIG. 9 .However, the IC device 800 may include a bottom insulation structure 854extending in the X direction on the upper surface FT of the fin-typeactive area FA. The bottom insulation structure 854 may include a firstinsulation portion 854A that fills a space between the first nanosheetN1 and the fin-type active area FA, a second insulation portion 154B(see FIG. 2B) extending from both sides of the first insulation portion854A in the Y direction and interposed between the isolation layer 114and the gate line 160, and a third insulation portion 854C extendingfrom both sides of the first insulation portion 854A in the X directionand interposed between the fin-type active area FA and source/drainregions 730. The first insulation portion 854A and the third insulationportion 854C may be integrally connected to each other, and a thicknessof the third insulation portion 854C may be less than that of the firstinsulation portion 854A. The bottom insulation structure 854 may have astructure integrally connected with the gate dielectric layer 152.

A lower surface level of each of the plurality of source/drain regions730 may be higher than the level of the upper surface FT of the fin-typeactive area FA. The bottom insulation structure 854 may contact thesource/drain regions 730. A plurality of bottom insulation structures854 may be disposed on a single fin-type active area FA. One nanosheetstack structure NSS and one gate line 160 may be disposed on a singlebottom insulation structure 854 on the single fin-type active area FA.Reference may be made to the detailed description of the bottominsulation structure 154 made above with reference to FIGS. 1 through3B, in order to describe a material used to form the bottom insulationstructure 854.

A semiconductor pattern 804 may be interposed between the upper surfaceFT of the fin-type active area FA and the source/drain regions 730. Awidth of the bottom insulation structure 854 in the X direction may bedefined by the semiconductor pattern 804. Each source/drain region 730may be separated from the fin-type active area FA with the semiconductorpattern 804 disposed therebetween. The semiconductor pattern 804 may beformed of a material that is different from that used to form the firstnanosheet N1. According to some embodiments, the semiconductor pattern804 may be formed of SiGe.

In the IC devices 200, 300, 400, 500, 600, 700, and 800 described abovewith reference to FIGS. 4A through 10 , the spaces between the firstnanosheets N1 and N31 closest to the fin-type active area FA from amongthe plurality of nanosheets N1, N2, N3, and N4 and from among theplurality of nanosheets N31, N2, N3, and N4, respectively, and thefin-type active area FA are filled with the bottom insulation structures154, 254, 454, 554, 654, 754, and 854, and the gate lines 160 and 460 donot include the sub-gate portions disposed between the first nanosheetsN1 and N31 and the fin-type active area FA. Accordingly, formation of anunwanted channel around the upper surface FT of the fin-type active areaFA facing the first nanosheets N1 and N31 may be suppressed, and thus nounwanted parasitic transistors may be formed. Thus, electricalcharacteristic degradation may be prevented from occurring due toparasitic transistors.

FIGS. 11 through 28B are cross-sectional views for explaining a methodof manufacturing an IC device, according to embodiments. A method ofmanufacturing the IC device 100 of FIGS. 1 thorough 3B will now bedescribed with reference to FIGS. 11 through 28B. FIGS. 11, 12A, 13A,14A, 15A, 16A, 17-22, 23A, 24A, 25A, 26A, 27A, and 28A arecross-sectional views for explaining a method of manufacturing a portionof the IC device 100 corresponding to the cross-section taken along theline X-X′ of FIG. 1 , and FIGS. 12B, 13B, 14B, 15B, 16B, 23B, 24B, 25B,26B, 27B, and 28B are cross-sectional views for explaining a method ofmanufacturing a portion of the IC device 100 corresponding to thecross-section taken along the line Y-Y′ of FIG. 1 . The same referencecharacters and numerals in FIGS. 11 through 28B as those in FIGS. 1through 3B denote the same elements, and thus their description will beomitted herein.

Referring to FIG. 11 , a plurality of sacrificial semiconductor layers104 and a plurality of nanosheet semiconductor layers NS are alternatelystacked on the substrate 102.

A height of a sacrificial semiconductor layer 104B closest to thesubstrate 102 from among the plurality of sacrificial semiconductorlayers 104 may be less than that of each of the other sacrificialsemiconductor layers 104. According to embodiments, the height of thesacrificial semiconductor layer 104B closest to the substrate 102 may beless than or equal to ½ of each of the other sacrificial semiconductorlayers 104.

According to embodiments, a semiconductor material forming the pluralityof sacrificial semiconductor layers 104 may be the same or differentfrom a semiconductor material forming the plurality of nanosheetsemiconductor layers NS. According to embodiments, the plurality ofsacrificial semiconductor layers 104 may be formed of SiGe, and theplurality of nanosheet semiconductor layers NS may be formed of Si.According to embodiments, the sacrificial semiconductor layer 104Bclosest to the substrate 102 from among the plurality of sacrificialsemiconductor layers 104 may be formed of a material having a differentetch selectivity from that of each of the other sacrificialsemiconductor layers 104. For example, each of the plurality ofsacrificial semiconductor layers 104 may be formed of an SiGe layer, buta Ge content ratio of the sacrificial semiconductor layer 104B closestto the substrate 102 may be different from those of the othersacrificial semiconductor layers 104.

Referring to FIGS. 12A and 12B, a mask pattern MP is formed on a stackof the plurality of sacrificial semiconductor layers 104 and theplurality of nanosheet semiconductor layers NS. The mask pattern MP maybe formed of a plurality of line patterns each extending parallel to oneanother in the X direction. The mask pattern MP may include a pad oxidelayer pattern 512 and a hardmask pattern 514. The hard mask pattern 514may be formed of silicon nitride, polysilicon, a spin on hardmask (SOH)material, or a combination thereof. The SOH material may be formed of ahydrocarbon compound having a relatively high carbon content of about85% to about 99% by weight based on the overall weight of the SOHmaterial.

Referring to FIGS. 13A and 13B, the trenches T1 are formed by partiallyetching the plurality of sacrificial semiconductor layers 104, theplurality of nanosheet semiconductor layers NS, and the substrate 102 byusing the mask pattern MP as an etch mask. As a result, the plurality offin-type active areas FA that are defined by the trenches T1 are formed,and a stack of the plurality of sacrificial semiconductor layer 104 andthe plurality of nanosheet semiconductor layers NS remains on each ofthe plurality of fin-type active areas FA.

Referring to FIGS. 14A and 14B, the isolation layers 114 are formedwithin the trenches T1.

Referring to FIGS. 15A and 15B, the mask pattern MP is removed from aresultant structure of FIGS. 14A and 14B, and a recess process forpartially removing the isolation layers 114 is performed such that uppersurfaces of the isolation layers 114 may be on a level that issubstantially the same as or similar to a level of the upper surface FTof the fin-type active area FA.

Referring to FIGS. 16A and 16B, a plurality of dummy gate structures DGSare formed on the plurality of fin-type active areas FA. Each of theplurality of dummy gate structures DGS may extend in a directionintersecting with a direction in which each of the plurality of fin-typeactive areas FA extends. Each of the plurality of dummy gate structuresDGS may have a structure in which an oxide layer D112, a dummy gatelayer D114, and a capping layer D116 are sequentially stacked. Accordingto some embodiments, the dummy gate layer D114 may be formed ofpolysilicon, and the capping layer D116 may be formed of a siliconnitride layer.

Referring to FIG. 17 , the first insulation spacers 118 are formed tocover respective both sidewalls of the plurality of dummy gatestructures DGS. The first insulation spacers 118 may be formed of asingle layer or multiple layers formed of SiN, SiCN, SiBN, SiON, SiOCN,SiBCN, SiOC, SiO₂, or a combination thereof.

A plurality of recess regions R1 exposing the upper surface of thefin-type active area FA are formed by partially etching out theplurality of sacrificial semiconductor layers 104 and the plurality ofnanosheet semiconductor layers NS by using the plurality of dummy gatestructures DGS and the plurality of first insulation spacers 118 as anetch mask. A lower surface level of each of the plurality of recessregions R1 may be lower than the level of the upper surface FT of thefin-type active area FA.

After the plurality of recess regions R1 are formed, the plurality ofnanosheet semiconductor layers NS may be divided into the plurality ofnanosheet stack structures NSS each including the plurality ofnanosheets N1, N2, N3, and N4.

Referring to FIG. 18 , indented regions 104D are formed between theplurality of nanosheets N1, N2, N3, and N4 of each nanostructure NSS bypartially removing, via isotropic etching, portions of the plurality ofsacrificial semiconductor layers 104 that are exposed on respective bothsides of the plurality of nanosheet stack structures NSS. A height (sizein the Z direction) of an indented region 104D closest to the fin-typeactive area FA from among the plurality of indented regions 104D may beless than that of each of the other indented regions 104D.

According to some embodiments, during the isotropic etching process forforming the plurality of indented regions 104D, a difference between anetch selectivity of the plurality of sacrificial semiconductor layers104 and that of the plurality of nanosheets N1, N2, N3, and N4 may beused. The isotropic etching process may be performed in a dry or wetmanner.

Referring to FIG. 19 , the plurality of second insulation spacers 120are formed to fill the plurality of indented regions 104D of FIG. 18 . Aheight of the second insulation spacer 120B closest to the fin-typeactive area FA from among the plurality of second insulation spacers 120may be less than that of each of the other plurality of secondinsulation spacers 120.

The plurality of second insulation spacers 120 may be formed by atomiclayer deposition (ALD), chemical vapor deposition (CVD), oxidation, or acombination thereof.

Referring to FIG. 20 , the plurality of source/drain regions 130 areformed by epitaxially growing a semiconductor material from respectiveexposed both sidewalls of the plurality of nanosheets N1, N2, N3, and N4and exposed surfaces of the fin-type active area FA.

Referring to FIG. 21 , the protective insulation layer 142 is formed tocover a resultant structure in which the plurality of source/drainregions 130 have been formed, and the inter-gate insulation layer 144 isformed on the protective insulation layer 142, and then the protectiveinsulation layer 142 and the inter-gate insulation layer 144 areplanarized to expose upper surfaces of the capping layers D116.

Referring to FIG. 22 , the dummy gate layers D114 are exposed byremoving the capping layers D116 from a resultant structure of FIG. 21 ,and the protective insulation layer 142 and the inter-gate insulationlayer 144 are partially removed such that an upper surface of theinter-gate insulation layer 144 is on substantially the same level asthat of each of the dummy gate layers D114.

Referring to FIGS. 23A and 23B, gate spaces GS are provided by removingthe dummy gate layers D114 and the oxide layers D112 below the dummygate layers D114 from a resultant structure of FIG. 22 , and theplurality of nanosheet stack structures NSS are exposed via the gatespaces GS.

Referring to FIGS. 24A and 24B, the plurality of sacrificialsemiconductor layers 104 remaining on the fin-type active area FA areremoved via the gate spaces GS, and thus the gate spaces GS are expandedto spaces between the plurality of nanosheets N1, N2, N3, and N4. Theplurality of nanosheets N1, N2, N3, and N4 may be exposed via theexpanded gate spaces GS. Insulation spaces INS may be formed betweenlower surfaces of the first nanosheets N1 and the upper surface FT ofthe fin-type active area FA.

Referring to FIGS. 25A and 25B, the gate dielectric layer 152 and thebottom insulation structure 154 are formed to cover the plurality ofnanosheets N1, N2, N3, and N4 and the exposed surfaces of the fin-typeactive area FA.

According to embodiments, the gate dielectric layer 152 and the bottominsulation structure 154 may be formed simultaneously. At least aportion of the bottom insulation structure 154 may be formed of the samematerial as that used to form the gate dielectric layer 152. The gatedielectric layer 152 and the bottom insulation structure 154 may beformed via ALD.

When a vertical separation distance between the upper surface of thefin-type active area FA and the first nanosheet N1 is less than or equalto ½ of a vertical separation distance between the first through fourthnanosheets N1, N2, N3, and N4, a separation space between the uppersurface FT of the fin-type active area FA and the first nanosheet N1 maybe filled with the bottom insulation structure 154 while the gatedielectric layer 152 is being formed between the first through fourthnanosheets N1, N2, N3, and N4. As shown in FIG. 25B, the bottominsulation structure 154 may be formed to include the first insulationportion 154A filling the space between the fin-type active area FA andthe first nanosheet N1, and the second insulation portion 154B coveringthe isolation layers 114.

Referring to FIGS. 26A and 26B, a gate forming conductive layer 160L isformed to cover the upper surface of the inter-gate insulation layer 144while filling the gate spaces GS (see FIGS. 25A and 25B) on the gatedielectric layer 152 and the bottom insulation structure 154.

The gate forming conductive layer 160L may be formed of metal, metalnitride, metal carbide, or a combination thereof. The gate formingconductive layer 160L may be formed via ALD.

Referring to FIGS. 27A and 27B, the plurality of gate lines 160 areformed by partially removing the gate forming conductive layer 160L,starting from an upper surface thereof, from a resultant structure ofFIGS. 26A and 26B until the upper surface of the inter-gate insulationlayer 144 is exposed. The plurality of gate lines 160 may include themain gate portion 160M and the plurality of sub-gate portions 160S.Because the space between the fin-type active area FA and the firstnanosheet N1 is filled with the bottom insulation structure 154, thegate lines 160 may not extend to the space between the upper surface FTof the fin-type active area FA and the first nanosheet N1. Becauseplanarization is performed while the plurality of gate lines 160 arebeing formed, respective heights of the protective insulation layer 142and the inter-gate insulation layer 144 may decrease.

Referring to FIGS. 28A and 28B, a plurality of contact holes 180exposing the plurality of source/drain regions 130 are formed by formingthe interlayer insulation layer 174 covering the plurality of gate lines160 and then partially etching the interlayer insulation layer 174 andthe inter-gate insulation layer 144. The metal silicide layers 182 areformed on respective upper surfaces of the plurality of source/drainregions 130 exposed via the plurality of contact holes 180, and thecontact plugs 184 are formed to fill the contact holes 180. In this way,the IC device 100 of FIGS. 1 through 3B may be formed.

According to the IC device manufacturing method described above withreference to FIGS. 11 through 28B, while the gate dielectric layer 152is being formed on respective surfaces of the first through fourthnanosheets N1, N2, N3, and N4, the bottom insulation structure 154having a larger thickness in a vertical direction than the gatedielectric layer 152 may be easily formed within a space between thefin-type active area FA and the first nanosheet N1. Accordingly,formation of an unwanted channel around the upper surface FT of thefin-type active area FA facing the lower surface of the first nanosheetN1 may be suppressed, and thus degradation of electrical characteristicsmay be suppressed.

The IC device 200 of FIGS. 4A and 4B may be manufactured according tothe method described above with reference to FIGS. 11 through 28B.However, in the process of FIG. 11 , the sacrificial semiconductor layer104B closest to the substrate 102 from among the plurality ofsacrificial semiconductor layers 104 may be formed to have a height thatis less than that of each of the other sacrificial semiconductor layers104 and is greater than two times the first thickness TH11 of the gatedielectric layer 152. Moreover, in the process of FIGS. 25A and 25B, thebottom insulation structure 254 of FIGS. 4A and 4B may be formed insteadof the bottom insulation structure 154. The first insulation portion254A and the second insulation portion 254B may be formed simultaneouslywith the formation of the gate dielectric layer 152. While the firstinsulation portion 254A is being formed, the air gap 254AG of which theupper limit and the lower limit are defined by the first insulationportion 254A may be formed in the space between the first nanosheet N1and the fin-type active area FA. Thereafter, the gate lines 160 may beformed according to the method described above with reference to FIGS.26A through 27B. While each of the gate lines 160 is being formed, aportion of the material used to form the gate line 160 flows toward anempty space between the lower surface of the first nanosheet N1 and thefin-type active area FA, and thus the protrusion 160P of the gate line160 is formed. Consequently, the Y direction width of the air gap 254AGmay be defined by the protrusion 160P.

The IC device 300 of FIGS. 5A and 5B may be manufactured according tothe method described above with reference to FIGS. 11 through 28B.However, in the process of FIG. 11 , the nanosheet semiconductor layerNS closest to the substrate 102 from among the plurality of nanosheetsemiconductor layers NS may be formed to have a height (size in the Zdirection) that is less than that of each of the other nanosheetsemiconductor layers 104.

FIGS. 29A through 29C are cross-sectional views for explaining a methodof manufacturing an IC device, according to embodiments. A method ofmanufacturing the IC device 400 of FIG. 6 will now be described withreference to FIGS. 29A through 29C. FIGS. 29A through 29C illustratecross-sectional structures of a portion of the IC device 400corresponding to the cross-section taken along line X-X′ of FIG. 1 ,according to manufacturing processes. The same reference characters andnumerals in FIGS. 29A through 29C as those in FIGS. 1 through 28B denotethe same elements, and thus their description will be omitted herein.

Referring to FIG. 29A, the first insulation spacers 118 coveringrespective both sidewalls of the plurality of dummy gate structures DGSare formed according to the method described above with reference toFIGS. 11 through 17 , the plurality of recess regions R1 are formed toexpose the upper surface of the fin-type active area FA, and then theplurality of source/drain regions 130 are formed on the fin-type activearea FA within the plurality of recess regions R1 according to themethod described above with reference to FIG. 20 . The plurality ofsource/drain regions 130 may be formed to contact respectively sidewallsof the plurality of sacrificial semiconductor layers 104.

Referring to FIG. 29B, gate spaces GS4 are formed by performing theprocesses described above with reference to FIGS. 21 through 24B withrespect to a resultant structure of FIG. 29A, and the plurality ofnanosheets N1, N2, N3, and N4 are exposed via the gate spaces GS4.Insulation spaces INS4 may be formed between the first nanosheets N1 andthe fin-type active area FA.

Referring to FIG. 29C, the bottom insulation structure 454 filling theinsulation spaces INS4 of FIG. 29B, and the gate dielectric layer 452are simultaneously formed by performing the processes described abovewith reference to FIGS. 25A through 27B with respect to a resultantstructure of FIG. 29B, and the plurality of gate lines 460 are formed.Thereafter, the IC device 400 of FIG. 6 may be manufactured according tothe process described above with reference to FIGS. 28A and 28B.

FIGS. 30A through 30D are cross-sectional views for explaining a methodof manufacturing an IC device, according to embodiments of the inventiveconcept. A method of manufacturing the IC device 500 of FIG. 7 will nowbe described with reference to FIGS. 30A through 30D. FIGS. 30A through30D illustrate cross-sectional structures of a portion of the IC device500 corresponding to the cross-section taken along line X-X′ of FIG. 1 ,according to manufacturing processes. The same reference characters andnumerals in FIGS. 30A through 30D as those in FIGS. 1 through 28B denotethe same elements, and thus their description will be omitted herein.

Referring to FIG. 30A, the first insulation spacers 118 coveringrespective both sidewalls of the plurality of dummy gate structures DGSare formed according to a similar method to the method described abovewith reference to FIGS. 11 through 17 , and a plurality of recessregions R5 are formed to expose the upper surface of the fin-type activearea FA. However, in contrast with the plurality of recess regions R1 ofFIG. 17 , a lower surface level of each of the plurality of recessregions R5 may be higher than that of the first nanosheet N1 closest tothe fin-type active area FA from among the plurality of nanosheets N1,N2, N3, and N4. The first nanosheet N1 may be exposed on the lowersurface of each of the plurality of recess regions R5.

Referring to FIG. 30B, the plurality of second insulation spacers 120are formed according to a similar method to the method described abovewith reference to FIGS. 18 and 19 . However, the second insulationspacers 120B are not formed between the fin-type active area FA and thefirst nanosheet N1.

Referring to FIG. 30C, according to a similar method as the methoddescribed above with reference to FIG. 20 , the plurality ofsource/drain regions 530 are formed on the first nanosheet N1, withinthe plurality of recess regions R5.

Referring to FIG. 30D, the IC device 500 of FIG. 7 may be manufacturedby performing similar processes to those described above with referenceto FIGS. 21 through 28B with respect to a resultant structure of FIG.30C. In particular, while the plurality of sacrificial semiconductorlayers 104 remaining on the fin-type active area FA are being removedvia the gate spaces GS according to the process described above FIGS.24A and 24B, the sacrificial semiconductor layer 104B remaining in aresultant structure of FIG. 30C is removed, and thus an insulation space(not shown) exposing the upper surface FT of the fin-type active area FAmay be formed. The insulation space may extend to a portion of a regionbetween the fin-type active area FA and the first nanosheet N1, theportion vertically overlapping each source/drain region 530. While thegate dielectric layer 152 is being formed according to the processdescribed above with reference to FIGS. 25A and 25B, the bottominsulation structure 554 may be formed within the insulation space. Thebottom insulation structure 554 may be formed to extend to the portionof the region between the fin-type active area FA and the firstnanosheet N1, the portion vertically overlapping each source/drainregion 530.

The IC device 600 of FIG. 8 may be manufactured according to theprocesses described above with reference to FIGS. 30A through 30D.However, the bottom insulation structure 654 instead of the bottominsulation structure 554 may be formed in the process described abovewith reference to FIG. 30D. To this end, while the plurality ofsacrificial semiconductor layers 104 remaining on the fin-type activearea FA are being removed via the gate spaces GS according to theprocess described above FIGS. 24A and 24B, only a portion of thesacrificial semiconductor layer 104B remaining in the resultantstructure of FIG. 30C may be removed, and the remaining portion of thesacrificial semiconductor layer 104B may remain as the semiconductorpattern 604 between the fin-type active area FA and the source/drainregions 530. As a result, a plurality of insulation spaces (not shown)of which widths in the X direction are defined by a plurality ofsemiconductor patterns 604 may be formed between the fin-type activearea FA and the first nanosheets N1. The insulation spaces may extend toportions of regions between the fin-type active area FA and the firstnanosheets N1, the portions vertically overlapping the source/drainregions 530. While the gate dielectric layer 152 is being formedaccording to the process described above with reference to FIGS. 25A and25B, a plurality of bottom insulation structures 654 may be formedwithin the plurality of insulation spaces.

FIGS. 31A through 31D are cross-sectional views for explaining a methodof manufacturing an IC device, according to embodiments. A method ofmanufacturing the IC device 700 of FIG. 9 will now be described withreference to FIGS. 31A through 31D. FIGS. 31A through 31D illustratecross-sectional structures of a portion of the IC device 500corresponding to the cross-section taken along line X-X′ of FIG. 1 ,according to manufacturing processes. The same reference characters andnumerals in FIGS. 31A through 31D as those in FIGS. 1 through 28B denotethe same elements, and thus their description will be omitted herein.

Referring to FIG. 31A, the first insulation spacers 118 coveringrespective both sidewalls of the plurality of dummy gate structures DGSare formed according to a similar method to the method described abovewith reference to FIGS. 11 through 17 , and a plurality of recessregions R7 are formed to expose the upper surface of the fin-type activearea FA. However, in contrast with the plurality of recess regions R1 ofFIG. 17 , a lower surface level of each of the plurality of recessregions R7 may be higher than that of the upper surface FT of thefin-type active area FA. The sacrificial semiconductor layer 104Bclosest to the substrate 102 from among the plurality of sacrificialsemiconductor layers 104 may be exposed on the lower surface of each ofthe plurality of recess regions R7.

Referring to FIG. 31B, the plurality of second insulation spacers 120are formed according to a similar method to the method described abovewith reference to FIGS. 18 and 19 . However, the second insulationspacers 120B are not formed between the fin-type active area FA and thefirst nanosheets N1.

According to embodiments, the sacrificial semiconductor layer 104Bclosest to the substrate 102 from among the plurality of sacrificialsemiconductor layers 104 may be formed of a material having a differentetch selectivity from that of each of the other sacrificialsemiconductor layers 104. In this case, while the plurality of indentedregions 104D are being formed between the plurality of nanosheets N1,N2, N3, and N4 as described above with reference to FIG. 18 in order toform the plurality of second insulation spacers 120, the amount ofconsumption of the sacrificial semiconductor layer 104B exposed on thelower surface of each of the recess regions R7 may be minimized, andthus the fin-type active area FA may not be exposed on the lower surfaceof each of the recess regions R7.

According to embodiments, the sacrificial semiconductor layer 104Bclosest to the substrate 102 from among the plurality of sacrificialsemiconductor layers 104 may be formed of the same material as that usedto form the other sacrificial semiconductor layers 104. In this case,while the plurality of indented regions 104D are being formed betweenthe plurality of nanosheets N1, N2, N3, and N4 as described above withreference to FIG. 18 , the sacrificial semiconductor layer 104B exposedon the lower surface of each of the recess regions R7 may also beetched, and thus the fin-type active area FA may be exposed on the lowersurface of each of the recess regions R7. In this case, in a processwhich will be described later with reference to FIG. 31C, source/drainregions (not shown) having lower surfaces that contact the fin-typeactive area FA may be obtained instead of the source/drain regions 730.

Referring to FIG. 31C, by performing a similar method as the methoddescribed above with reference to FIG. 20 with respect to a resultantstructure of FIG. 31B, the plurality of source/drain regions 730 areformed on the sacrificial semiconductor layer 104B, within the pluralityof recess regions R7.

Referring to FIG. 31D, the IC device 700 of FIG. 9 may be manufacturedby performing similar processes to those described above with referenceto FIGS. 21 through 28B with respect to a resultant structure of FIG.31C. In particular, while the plurality of sacrificial semiconductorlayers 104 remaining on the fin-type active area FA are being removedvia the gate spaces GS according to the process described above FIGS.24A and 24B, the sacrificial semiconductor layer 104B remaining in theresultant structure of FIG. 31C is removed, and thus an insulation space(not shown) exposing the upper surface FT of the fin-type active area FAmay be formed. The insulation space may extend to a region between thesource/drain regions 730 and the fin-type active area FA. While the gatedielectric layer 152 is being formed according to the process describedabove with reference to FIGS. 25A and 25B, the bottom insulationstructure 754 may be formed within the insulation space. The bottominsulation structure 754 may be formed to extend to portions of regionsbetween the source/drain regions 730 and the fin-type active area FA,the portions vertically overlapping the source/drain regions 730.

The IC device 800 of FIG. 10 may be manufactured according to theprocesses described above with reference to FIGS. 31A through 31D.However, the bottom insulation structure 854 instead of the bottominsulation structure 754 may be formed in the process described abovewith reference to FIG. 31D. To this end, while the plurality ofsacrificial semiconductor layers 104 remaining on the fin-type activearea FA are being removed via the gate spaces GS according to theprocess described above FIGS. 24A and 24B, only a portion of thesacrificial semiconductor layer 104B remaining in the resultantstructure of FIG. 31C may be removed, and the remaining portion of thesacrificial semiconductor layer 104B may remain as the semiconductorpattern 804 between the upper surface FT of the fin-type active area FAand the source/drain regions 730. As a result, a plurality of insulationspaces (not shown) of which widths in the X direction are defined by aplurality of semiconductor patterns 804 may be formed between thefin-type active area FA and the first nanosheets N1. The insulationspace may extend to a portion of the region between the source/drainregions 730 and the fin-type active area FA. While the gate dielectriclayer 152 is being formed according to the process described above withreference to FIGS. 25A and 25B, a plurality of bottom insulationstructures 854 may be formed within the plurality of insulation spaces.

According to the IC device manufacturing methods described above withreference to FIGS. 29A through 31B, a structure capable of suppressingdegradation of electrical characteristics by suppressing formation of anunwanted channel around an upper surface of a fin-type active area maybe provided.

Although the methods of manufacturing the IC devices 100 through 700 ofFIGS. 1 through 10 have been described above with reference to FIGS. 11through 31D, other IC devices having various structures may bemanufactured via various modifications made within the technical spiritof the inventive concept.

While the inventive concept has been particularly shown and describedwith reference to embodiments thereof, it will be understood thatvarious changes in form and details may be made therein withoutdeparting from the spirit and scope of the following claims.

What is claimed is:
 1. An integrated circuit device comprising: afin-type active area protruding from a substrate and extending in afirst horizontal direction; a first nanosheet disposed above an uppersurface of the fin-type active area with a first separation spacetherebetween; a second nanosheet disposed above the first nanosheet witha second separation space therebetween; a gate line extending on thesubstrate in a second horizontal direction intersecting the firsthorizontal direction, the gate line having a sub-gate portion disposedin the second separation space; a source/drain region disposed on thefin-type active area and in contact with the first nanosheet and thesecond nanosheet, a first level of a lower surface of the source/drainregion being higher than a second level of the upper surface of thefin-type active area; and a bottom insulation structure disposed in thefirst separation space, wherein no portion of the gate line is disposedin the first separation space.
 2. The integrated circuit device of claim1, wherein the bottom insulation structure includes: a first insulationportion that fills the first separation space between the firstnanosheet and the fin-type active area; and a second insulation portionextending from a side of the first insulation portion in the firsthorizontal direction and interposed between the fin-type active area andthe source/drain region.
 3. The integrated circuit device of claim 2,wherein the first insulation portion and the second insulation portionare integrally connected to each other, and have the same thickness aseach other.
 4. The integrated circuit device of claim 1, wherein anupper surface of the first nanosheet contacts the lower surface of thesource/drain region.
 5. The integrated circuit device of claim 1,wherein the first level of the lower surface of the source/drain regionis higher than a third level of an upper surface of the bottominsulation structure.
 6. The integrated circuit device of claim 1,wherein the first nanosheet includes a first portion that is verticallyoverlapped by the source/drain region and a second portion that isvertically overlapped by the gate line, and a first thickness of thefirst portion of the first nanosheet is less than a second thickness ofthe second portion of the first nanosheet.
 7. The integrated circuitdevice of claim 1, wherein the lower surface of the source/drain regionis spaced apart from the upper surface of the fin-type active area withthe first nanosheet and the bottom insulation structure between thesource/drain region and the fin-type active area.
 8. The integratedcircuit device of claim 1, further comprising: a semiconductor patterninterposed between the upper surface of the fin-type active area and thesource/drain region, wherein a width of the bottom insulation structurein the first horizontal direction is defined by the semiconductorpattern.
 9. The integrated circuit device of claim 8, wherein thesource/drain region is separated from the fin-type active area with thesemiconductor pattern and the first nanosheet between the source/drainregion and the fin-type active area, and wherein the semiconductorpattern and the first nanosheet are formed of different materials. 10.The integrated circuit device of claim 8, wherein the source/drainregion is separated from the fin-type active area with the semiconductorpattern between the source/drain region and the fin-type active area,and wherein a width of the semiconductor pattern in the first horizontaldirection is less than a width of the source/drain region in the firsthorizontal direction.
 11. The integrated circuit device of claim 1,wherein the bottom insulation structure includes: a first insulationportion that fills the first separation space between the firstnanosheet and the fin-type active area; and a second insulation portionextending from a side of the first insulation portion in the firsthorizontal direction and interposed between the fin-type active area andthe source/drain region, wherein the first insulation portion has afirst thickness in a vertical direction, and the second insulationportion has a second thickness in the vertical direction, the secondthickness being less than the first thickness.
 12. The integratedcircuit device of claim 1, wherein the bottom insulation structureincludes a first portion that is vertically overlapped by thesource/drain region and a second portion that is vertically overlappedby the gate line, and a first thickness of the first portion of thebottom insulation structure is less than a second thickness of thesecond portion of the bottom insulation structure.
 13. An integratedcircuit device comprising: a fin-type active area protruding from asubstrate and extending in a first horizontal direction; a pair ofsource/drain regions disposed on the fin-type active area, a first levelof a lower surface of each of the pair of source/drain regions beinghigher than a second level of an upper surface of the fin-type activearea; a nanosheet stack structure facing the upper surface of thefin-type active area with a first separation space between the nanosheetstack structure and the upper surface of the fin-type active area, thenanosheet stack structure comprising a plurality of nanosheets disposedbetween the pair of source/drain regions; a gate line extending on thefin-type active area in a second horizontal direction intersecting thefirst horizontal direction and having a sub-gate portion disposed in asecond separation space between two nanosheets from among the pluralityof nanosheets; a gate dielectric layer interposed between the pluralityof nanosheets and the gate line; and a bottom insulation structure inthe first separation space, wherein no portion of the gate line isdisposed in the first separation space.
 14. The integrated circuitdevice of claim 13, wherein the bottom insulation structure includes: afirst insulation portion that fills the first separation space betweenthe nanosheet stack structure and the fin-type active area; and a secondinsulation portion extending from a side of the first insulation portionin the first horizontal direction and interposed between the fin-typeactive area and each of the pair of source/drain regions.
 15. Theintegrated circuit device of claim 13, wherein an upper surface of thefirst nanosheet contacts the lower surface of each of the pair ofsource/drain regions.
 16. The integrated circuit device of claim 13,wherein the nanosheet stack structure includes a first nanosheet closestto the fin-type active area from among the plurality of nanosheets,wherein the first nanosheet includes a pair of first portions that arevertically overlapped by the pair of source/drain regions, respectively,and a second portion that is vertically overlapped by the gate line, andwherein a first thickness of each of the pair of first portions of thefirst nanosheet is less than a second thickness of the second portion ofthe first nanosheet.
 17. The integrated circuit device of claim 13,further comprising: a pair of semiconductor patterns interposed betweenthe upper surface of the fin-type active area and the pair ofsource/drain regions, wherein a width of the bottom insulation structurein the first horizontal direction is defined by the pair ofsemiconductor patterns.
 18. The integrated circuit device of claim 13,wherein the bottom insulation structure includes: a first insulationportion that fills the first separation space between the nanosheetstack structure and the fin-type active area; and a second insulationportion extending from a side of the first insulation portion in thefirst horizontal direction and interposed between the fin-type activearea and one of the pair of source/drain regions, wherein the firstinsulation portion has a first thickness in a vertical direction, andthe second insulation portion has a second thickness in the verticaldirection, the second thickness being less than the first thickness. 19.An integrated circuit device comprising: a fin-type active areaextending on a substrate in a first horizontal direction; a source/drainregion disposed on the fin-type active area; a nanosheet stack structuredisposed on the fin-type active area, the nanosheet stack structurecomprising a first nanosheet and a second nanosheet, wherein the firstnanosheet is closer to the fin-type active area than the secondnanosheet; a gate line covering the nanosheet stack structure on thefin-type active area, and extending in a second horizontal directionintersecting the first horizontal direction; a gate dielectric layerdisposed between the nanosheet stack structure and the gate line; and abottom insulation structure interposed between the fin-type active areaand the first nanosheet, and integrally connected to the gate dielectriclayer, wherein a first level of a lower surface of the source/drainregion being higher than a second level of an upper surface of thefin-type active area, and wherein no portion of the gate line isdisposed between the fin-type active area and the first nanosheet. 20.The integrated circuit device of claim 19, wherein the bottom insulationstructure includes: a first insulation portion that fills a spacebetween the first nanosheet and the fin-type active area; and a secondinsulation portion extending from a side of the first insulation portionin the first horizontal direction and interposed between the fin-typeactive area and the source/drain region.